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ALD16 Series UHP Diaphragm Valves
ALD16 Series UHP Diaphragm Valves
ALD16 series high purity diaphragm valve is designed for atomic layer deposition processes in the semiconductor industry.
Features
Suitable for ultra-high purity applications
High speed pneumatic actuator, response time <20ms
Face seal fittings (FSR) or butt weld connections
100% Helium-leak tested
Dimensions
Dimensions
Ordering Information
EX: SLV
Body Material
- ALD16
Series
T
Temperature
P
Actuation
L
Working Pressure
- VM4
Inlet / Outlet Connection*
- NO
Actuator Specifications
- IS
Options
- S1
Process Standard
SLV: 316L VAR ALD16 Blank:
Up to 120℃
T: Up to 200℃
P: Pneumatic L: 300 psi
S: 150 psi
VM4, VSM4, VSF4,
TW4
......
Please contact GENTEC
for more information
Blank: Standard
(Normally closed)
NO: Normally open
IS: with proximity
switch indicator
sensor
IV: with solenoid
valve
S1: UHP Process
Standard
S2: Photovoltaic
Process Standard

*: When the inlet and outlet connections are identical, only one code should be provided. If they differ, the first code corresponds to the inlet connection, while the second code is for the outlet connection.

IS: Electrical Indicator Switch for high pressure pneumatic actuator.


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