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ALD27 Series UHP Diaphragm Valves
ALD27 Series UHP Diaphragm Valves
ALD27 series high purity diaphragm valve is designed for atomic layer deposition processes in the semiconductor industry.
Features
Suitable for ultra-high purity applications
High speed pneumatic actuator, response time ≤5ms
The flow control device ensures accurate and consistent Cv between valves
Face seal fittings (FSR) or butt weld connections
100% Helium-leak tested
Dimensions
Dimensions
Ordering Information
EX: SLV
Body Material		 - ALD27
Body Material		 T
Temperature		 P
Actuation		 S
Working Pressure*		 - VSF8
Inlet / Outlet Connection**		 - IS
Options		 - S1
Process Standard
SLV: 316L VAR
SLVV: 316L VIM VAR		 ALD27 Blank:
Up to 120℃
T: Up to 200℃
 P: Pneumatic S: 150 psi VSM8, VSF8,
TW8
......
Please contact GENTEC
for more information		 IS: with proximity switch
indicator sensor
IV: with solenoid valve
IH: with heater mounting
hole		 S1: UHP Process
Standard
S2: Photovoltaic
Process Standard

*: Recommended working pressure of less than 35 psi (2.4 bar) maximizes cycle life.

**: When the inlet and outlet connections are identical, only one code should be provided. If they differ, the first code corresponds to the inlet connection, while the second code is for the outlet connection.


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