ALD26 Series UHP Diaphragm Valves
ALD26 series high purity diaphragm valve is designed for atomic layer deposition processes in the semiconductor industry.
Features
Suitable for ultra-high purity applications
High speed pneumatic actuator, response time ≤5ms
The flow control device ensures accurate and consistent Cv between valves
Face seal fittings (FSR) or butt weld connections
100% Helium-leak tested
Pneumatic Actuator
Operating Pressure: 50~90 psi (Normally Closed)
Operating Pressure: 70~90 psi (Normally Open)
Operating Pressure: 50~90 psi (Normally Closed)
Operating Pressure: 70~90 psi (Normally Open)
Working Status: Normally Closed or Normally Open
沪 ICP备案 05032053
