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DV89 Series UHP Diaphragm Valves
DV89 Series UHP Diaphragm Valves
DV89 series ultra-high purity diaphragm valves are designed for ultra-high purity gas systems in the semiconductor and photovoltaic industries.
Features
316L stainless steel body
Pneumatic actuation
1/2” Face seal fittings (FSR) connections
Internal spring-less design and metal-to-metal seal minimizes particle generation and ensures “purity integrity″ in the flow passages
100% Helium-leak tested
Dimensions
Dimensions
Ordering Information
EX: SL
Body Material		 - DV89
Series		 P
Actuation		 H
Working Pressure		 - VM8
Inlet / Oulet Connection*		 - K
Seat Material		 - S1
Process Standard
SL: 316L DV89 P: Pneumatic H: 3000 psi VM8: 1/2” male FSR
......
Please contact GENTEC for more information		 K: PCTFE S1: UHP Process
Standard
S2: Photovoltaic Process
Standard

*: When the inlet and outlet connections are identical, only one code should be provided. If they diffffer, the fifirst code corresponds to the inlet connection, while the second code is for the outlet connection.

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