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DV74 Series UHP Diaphragm Valves
DV74 Series UHP Diaphragm Valves
Features
Suitable for ultra high purity applications
316L stainless steel enhances weldability and resistance to corrosion
Manual or pneumatic actuation are available
Face seal fittings (FSR) or butt welded connections
Internal springless design
Metal-to-metal seal minimizes particle generation and ensures high purity in the flow passages
Control knob includes a window indicating working status (i.e. open or closed)
100% Helium leak tested
Multiple flow paths available
Electropolished
Dimensions
Dimensions
Flow Type
Flow Type
Ordering Information
EX: SL
Body Material		 - DV74
Valve Series		 M
Actuation		 H
Working Pressure		 B
Flow Path		 - VSM4
Inlet / Outlet Connection*		 - K
Seat Material		 - NO
Options		 - S1
Process Standard
SL: 316L DV74 M: Handwheel
( With display )
P: Pneumatic actuator
( normally closed )
 H: 3500 psi
L: 300 psi
 Blank: In-line Type
Elbow Type
P: Right inlet, top outlet
Q: Right inlet, bottom outlet
Three-way Valve
B: Right inlet, left / top outlet
C: Right inlet, left / bottom outlet
D: Right / top inlet, left outlet
E: Right inlet, top / bottom outlet
F: Top / bottom inlet, left outlet
H: Left / right inlet, top outlet
Four-way Valve
I: Left / right inlet, top / bottom outlet
J: Right inlet, left / top / bottom outlet
K: Right / bottom inlet, left / top outlet
L: Left / bottom / right inlet, top outlet
Rear-entry Valve
A: Rear inlet, right outlet
T: Rear inlet, left / right outlet
R: Rear inlet, left / right / top / bottom outlet
Please refer to Flow Path Designator table above 		TW4, TW6,
VSM4, VSF4
......
Please contact GENTEC
for more information		 K: PCTFE
V: Vespel®		 Blank: Standard (N/C)
NO: Normally open
( Pneumatic)		 S1: UHP Process Standard
S2: Photovoltaic Process Standard

*: When the inlet and outlet connections are identical, only one code should be provided. If they differ, the first code corresponds to the inlet connection, while the second code is for the outlet connection.

IS: Electrical Indicator Switch for high pressure pneumatic actuator.


Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
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