
ALD37 Series UHP Diaphragm Valves
ALD37 series high purity diaphragm valve is designed for atomic layer deposition processes in the semiconductor industry.
Features
Suitable for ultra-high purity applications
High speed pneumatic actuator, response time ≤5ms
The flow control device ensures accurate and consistent Cv between valves
Face seal fittings (FSR) or butt weld connections
100% Helium-leak tested