DV87 Series UHP Diaphragm Valves

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Regulators
Valves
Fittings
Flow Switch
Gauges
Gas Systems
Welding, Cutting & Heating Apparatus

Flow Switch

UHP Gauges

DV87 Series UHP Diaphragm Valves

Features

Suitable for ultra high purity applications

Both manual and pneumatic actuation are available

Low dead volume < 3.0 cc

Cleaned and degreased for oxygen service according to CGA G-4.1 and ASTM G93 Class C, respectively

Internal spring-less design and metal-to-metal seal minimize particle generation and ensures "purity integrity" in the flow pasages

100% Helium-leak tested

Flow

Cv=0.65
Max Operating Pressure

300 psi
Leak Rate

1x10^-9 atm cc/sec He
Temperature

-40°F ~ 150°F
Internal Volume

6.9 cc

Dimensions

Ordering Information

EX:	SL Body Material	- DV87 Series	P Actuation	L Working Pressure	- VSF8 Inlet / Outlet Connection*	- K Seat Material	- NO Options	- S1 Process Standard
	SL: 316L SLV: 316L VAR	DV87	M: Handwheel (With display)， 90° switch L: LOTO Handle	L: 300 psi	VM8: 1/2" Face seal male ( FSR fittings ) VSM8: 1/2" Face seal swivel male ( FSR fittings ) VSF8: 1/2" Face seal swivel female ( FSR fittings ) TW8: 1/2" Butt weld ...... Please contact GENTEC for more information	K: PCTFE V: Vespel^®	Blank: Standard (Normally closed)	S1: UHP Process Standard S2: Photovoltaic Process Standard
	SL: 316L SLV: 316L VAR	DV87	P: Pneumatic actuator (Normally closed)	S: 150 psi	VM8: 1/2" Face seal male ( FSR fittings ) VSM8: 1/2" Face seal swivel male ( FSR fittings ) VSF8: 1/2" Face seal swivel female ( FSR fittings ) TW8: 1/2" Butt weld ...... Please contact GENTEC for more information	K: PCTFE V: Vespel^®	Blank: Standard NO: Normally Open	S1: UHP Process Standard S2: Photovoltaic Process Standard

*: When the inlet and outlet connections are identical, only one code should be provided. If they differ, the first code corresponds to the inlet connection, while the second code is for the outlet connection.

IS: Electrical Indicator Switch for high pressure pneumatic actuator.

Industry application

Widely used in semiconductor industry More

Also applied to photovoltaic industry More

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