DV87 Series UHP Diaphragm Valves
Features
Suitable for ultra high purity applications
Both manual and pneumatic actuation are available
Low dead volume < 3.0 cc
Cleaned and degreased for oxygen service according to CGA
G-4.1 and ASTM G93 Class C, respectively
Internal spring-less design and metal-to-metal seal minimize
particle generation and ensures "purity integrity" in the flow pasages
100% Helium-leak tested