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U19 Series Tied-Diaphragm UHP Regulator
U19 Series Tied-Diaphragm UHP Regulator
U19 series single stage tied-diaphragm UHP regulator is designed for the semiconductor industry and manufactured in accordance with SEMl requirements. The regulators are assembled, tested and packaged in a class 100 clean room.
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
Dimensions
Dimensions
FLOW
FLOW
Ordering Information
订购指南
Ex： U19
Series		 SL
Body		 B
Ports		 K
Seat		 - D
Inlet Pressure		 H
Outlet Pressure		 P
Pressure Gauge		 - VSF4
Inlet / Outlet Connection		 - E
Surface Finish		 - H
Corrosion Resistance		 - P
Options
U19
U19A
 SL: 316L
SLV: 316L VAR
 A
B
G
 K: PCTFE
V: Vespel®
 C: 4500 psi
D: 3000 psi
F: 500 psi
 G: 0 ~ 250 psi
H: 0 ~ 150 psi
I: 0 ~ 100 psi
K: 0 ~ 50 psi
L: 0 ~ 25 psi
M: 0 ~ 15 psi
 W: Without Gauge
P: psi / bar Gauge
K: psi / kPa Gauge
 VSF4, VSM4
VSF8, VSM8
......
 E1: Ra 10 μin
 None: Standard
H: HC22 Stem and Nozzle
 None: Rear Bracket Mounting
P: Panel Mounting
Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
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