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U11 Series Tied-Diaphragm UHP Regulator
U11 Series Tied-Diaphragm UHP Regulator
U11 series single stage Tied-Diaphragm ultra high purity regulator is developed for the semiconductor industry, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100（ISO 5）clean room.
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested
Dimensions
Dimensions
Flow Data
Flow Data
Ordering Information
订购指南
Ex: U11
Series		 SL
Body Material		 B
Body Ports		 K
Seat Material		 - D
Inlet Pressure		 H
Outlet Pressure		 P
Gauge*		 - VSF4- VSM4
Inlet / Outlet Connection		 - H
Corrosion Resistance		 - P
Options		 - S1
Process Standard
U11
U11A
 SL: 316L
SLV: 316L VAR 		A
B
G
 K: PCTFE
V: Vespel® 		D: 3000 psi
C: 4500 psi
F: 500 psi
 F: 0 ~ 500 psi
G: 0 ~ 250 psi
H: 0 ~ 150 psi
I: 0 ~ 100 psi
K: 0 ~ 50 psi
L: 0 ~ 25 psi 		W: Without Gauge
P: psi / bar Gauge
K: psi / kPa Gauge
 VSF4, VSM4, VSF8, VSM8
TW4, TW6
……
When Inlet and Outlet
Connections are the same,
please write a connection code. 		None: 316L nozzle and stem
H: HC22 stem and nozzle 		None: Rear Bracket Mounting
P: Panel Mounting
 S1: UHP Process Standard
S2: Photovoltaic Process Standard

*: Gauges’ connection: 1/4″swivel male FSR , other connection type please conect GENTEC.

Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
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