U12 Series Tied-Diaphragm UHP Regulator

Language

Regulators
Valves
Fittings
Flow Switch
Gauges
Gas Systems
Welding, Cutting & Heating Apparatus

Flow Switch

UHP Gauges

U12 Series Tied-Diaphragm UHP Regulator

U12 series single stage Tied-Diaphragm ultra high purity regulator is developed for the semiconductor industry, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100（ISO 5）clean room.

Features

316L or 316L VAR stainless steel body

Metal to metal diaphragm to body seal

Easy front panel and rear bracket mounting

Gauge ports are standard with 1/4" face seal male

Fully internal electropolished

Cleaned, assembled, and packaged for high-purity semi-conductor applications

High-cycle life

100% Helium-leak tested

Flow

Cv=0.45
Max. Inlet Pressure

3000 psi
Leakage

1 x 10^-9 atm cc/sec He
Temperature

-40°F ~ 165°F
Internal Volume

17.4 cc

Dimensions

Flow Data

Ordering Information

Ex:	U12 Series	SL Body Material	B Body Ports	K Seat Material	- D Inlet Pressure	I Outlet Pressure	P Gauge*	- VSF4-VSM4 Inlet / Outlet Connection	- H Corrosion Resistance	- P Options	- S1 Process Standard
	U12	SL: 316L SLV:316L VAR	A B G	K: PCTFE V: Vespel^®	D: 3000 psi F: 500 psi	G: 0 ~ 250 psi H: 0 ~ 150 psi I: 0 ~ 100 psi K: 0 ~ 50 psi L: 0 ~ 25 psi	W: Without Gauge P: psi / bar Gauge K: psi / kPa Gauge	VSF4, VSM4, VSF8, VSM8 TW6, TW8 ……	None: 316L H: HC22 stem and nozzle	None: Rear Bracket Mounting P: Panel Mounting	S1: UHP Process Standard S2: Photovoltaic Process Standard
	U12V	SL: 316L SLV: 316L VAR	A B G	K: PCTFE V: Vespel®	G: 250 psi	Q: 30″Hg Vac~30 psi R: 30″Hg Vac~60 psi S: 30″Hg Vac~100 psi	W: Without Gauge P: psi / bar Gauge K: psi / kPa Gauge	VSF4, VSM4, VSF8, VSM8, TW6, TW8 ......	None: Standard H: C-22 stem and nozzle	None: Rear Bracket Mounting P: Panel Mounting	S1: UHP Process Standard S2: Photovoltaic Process Standard