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U10 Series UHP Regulator
U10 Series UHP Regulator
U10 Series regulators are manufactured to comply with SEMI standards. The products are assembled and tested in a class 100（ISO 5） clean room and suitable for semiconductor and UHP applications.
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Rear bracket mounting
Fully internal electropolished
Cleaned, assembled and packaged for high purity semi-conductor applications
High-cycle life
100% Helium-leak tested
Dimensions
Dimensions
FLOW
FLOW
Ordering Information
订购指南
Ex: U10
Series		 SL
Body Material		 A
Body Ports		 K
Seat Material		 - D
Inlet Pressure		 L
Outlet Pressure		 W
Gauge*		 - VSF4- VSM4
Inlet/Outlet Connection		 - H
Corrosion Resistance		 - S1
Process Standard
U10
U10A
 SL: 316L
SLV: 316L VAR
 A
B		 K: PCTFE
V: Vespel®		 D: 3000 psi
F: 500 psi
H: 150 psi
I: 100 psi
 H: 0~150 psi
I: 0~100 psi
K: 0~50 psi
L: 0~25 psi
 W: without gauge
 VSF4: 1/4” swivel female FSR
VSM4: 1/4” swivel male FSR
TW4: 1/4” weld stub
.......
When Inlet and Outlet Connections
are the same, please write a
connection code.		 None: 316L
H: HC-22 stem and nozzle
See Material
Configuration table.		 S1: UHP Process Standard
S2: Photovoltaic Process Standard

*: Gauges’ connection: 1/4″swivel male FSR , other connection type please conect GENTEC.

Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
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