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U13 Series Tied-Diaphragm UHP Regulator
U13 Series Tied-Diaphragm UHP Regulator
U13 series single stage Tied-Diaphragm ultra high purity regulator is developed for the semiconductor industry, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100（ISO 5）clean room.
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested
Dimensions
Dimensions
Flow Data
Flow Data
Ordering Information
订购指南
Ex: U13
Series		 SL
Body		 B
Ports		 K
Seat		 - D
Inlet Pressure		 I
Outlet Pressure		 P
Pressure Gauge		 - VSF4
Inlet / Outlet Connection		 - E
Surface Finish		 -H
Corrosion Resistance		 - P
Options
U13
U13A		 SL: 316L
SLV:316L VAR		 A
B
G		 K: PCTFE
V: Vespel®		 D: 3000 psi
F: 500 psi		 G: 0 ~ 250 psi
H: 0 ~ 150 psi
I: 0 ~ 100 psi
K: 0 ~ 50 psi
L: 0 ~ 25 psi
 W: Without Gauge
P: psi / bar Gauge
K: psi / kPa Gauge		 VSF4, VSM4, VSF8, VSM8
TW6, TW8
……
When Inlet and Outlet
Connections are the same,
please write a connection code. 		E: Ra 10 μin None: 316L
H: HC22 stem and nozzle		 None: Rear Bracket Mounting
P: Panel Mounting
Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
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