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U74 Series UHP Back Pressure Regulator
U74 Series UHP Back Pressure Regulator
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4” face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested
Dimensions
Dimensions
Flow Data
Flow Data
Ordering Information
订购指南
EX: U74
Series		 SL
Body		 A
Ports		 Q
Seat		 - G
Back Pressure Range		 W
Pressure Gauge		 - VSF4 - VSM4
Inlet / Outlet Connection		 - H
Corrosion Resistance		 - P
Options		 - S2
Process Standard
U74 SL: 316L
SLV: 316L VAR
 A
D
 Q: FFKM
 G: 0 ~ 250 psi
H: 0 ~ 150 psi
I: 0 ~ 100 psi
J: 0 ~ 75 psi
K: 0 ~ 50 psi
L: 0 ~ 25 psi
 W: Without Gauge
P: psi / bar Gauge
K: psi / kPa Gauge
 VSF4, VSM4
VSF8, VSM8
TW4, TW6
......
When Inlet and Outlet
Connections are the
same, please write a
connection code. 		None:: 316L
H: C-22 Diaphragm
 None: Rear Bracket Mounting
P: PanelMounting 		S1: UHP Process Standard
S2:Photovoltaic Process Standard

*: Gauges' connection: 1/4″swivel male FSR , other connection type please conect GENTEC.

Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
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