Language
  • Regulators
  • Valves
  • Fittings
  • Gauges
  • Gas Systems
  • Welding, Cutting & Heating Apparatus
  • Others
U71 Series UHP Back Pressure Regulator
U71 Series UHP Back Pressure Regulator
U71 Series Diaphragm Back Pressure Regulator is used to regulate the upstream pressure with precise pressure control, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100 clean room.
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested
Dimensions
Dimensions
Flow Data
Flow Data
Ordering Information
订购指南
EX: U71
Series		 SL
Body		 A
Ports		 K
Seat		 - G
Back Pressure Range		 W
Pressure Gauge		 -VSF4-VSM4
Inlet / Outlet Connection		 - H
Corrosion Resistance		 - P
Options		 - S2
Process Standard
U71 SL: 316L
SLV: 316L VAR
 A
D
 K: PCTFE
 G: 0 ~ 250 psi
H: 0 ~ 150 psi
I: 0 ~ 100 psi
J: 0 ~ 75 psi
K: 0 ~ 50 psi
L: 0 ~ 25 psi
 W: Without Gauge
P: psi / bar Gauge
K: psi / kPa Gauge
 VSF4, VSM4
VSF8, VSM8
......
When Inlet and Outlet
Connections are the
same, please write a
connection code. 		None:: 316L
H: C-22 Diaphragm
 None: Rear Bracket Mounting
P: PanelMounting 		S1: UHP Process Standard
S2:Photovoltaic Process Standard

*: Gauges' connection: 1/4″swivel male FSR , other connection type please conect GENTEC.

Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
Download
Catalog
2D
3D
Similar products
2D/3D data download
Name：*
Company：*
Phone：*
E-mail：*
Area：*
  • 1
Product Category：*
  • Regulators
  • Valves
  • Fittings
  • Gauges
  • Gas Systems
  • Welding, Cutting & Heating Apparatus
  • Others
(Multiple choice)
Regulators
Valves
Fittings
Gauges
Gas Systems
Welding, Cutting & Heating Apparatus
Others
*Your information is incomplete, please fill it out and send it again!
Your application has been sent!
Our sales staff will contact you as soon as possible!
After-sales phone
400-1898-322

Copyright © 2009-2012 GENTEC SHANGHAI CORPORATION   沪 ICP备案 05032053