| 系列号 | 型号 | 公称流量 | 流量调节范围 | 额定浓度 | 浓度调节范围（注1） | 进出气连接 |
|---|---|---|---|---|---|---|
293MX
|
293MX-25-C10Ar(2/25) 293MX-25-H10Ar(2/25) 293MX-25-H10N(2/25) 293MX-25-H10Ar(2/25) 293MX-25-H10Ar(2/25) 293MX-30-C20Ar(5/25) 293MX-30-H20N(5/25) 293MX-30-H20Ar(5/25) 293MX-30-O20Ar (5/25) 293MX-50-C50N(25/25) 293MX-50-C4Ar(2/50) 293MX-50-C50Ar(25/25) 293MX-75-He30Ar（25/50) 293MX-100-Ar20He(25/80) 293MX-100-Ar50N(50/50) 293MX-100-C50/O(50/50) 293MX-100-N50/O(50/50) 293MX-100-C50Ar（50/50) 293MX-100-C50N(50/50) 293MX-125-C20Ar(25/100) 293MX-200-Ar25He(50/150) 293MX3-35-O5C5Ar25 293MX3-70-He10C10Ar50 |
25 L/min 25 L/min 25 L/min 25 L/min 25 L/min 30 L/min 30 L/min 30 L/min 30 L/min 50 L/min 50 L/min 50 L/min 75 L/min 100 L/min 100 L/min 100 L/min 100 L/min 100 L/min 100 L/min 125 L/min 200 L/min 35 L/min 70 L/min |
C:0.2~2; Ar:2.5~25 L/min H:0.2~2; Ar:2.5~25 L/min H:0.2~2; N:2.5~25 L/min H:0.2~2; Ar:2.5~25 L/min O:0.1~1; Ar:2.5~25 L/min C:0.5~5; Ar:2.5~25 L/min H:0.5~5; N:2.5~25 L/min H:0.5~5; Ar:2.5~25 L/min O:0.5~5; Ar:2.5~25 L/min C:2.5~25; N:2.5~25 L/min C:0.2~2; Ar:5~50 L/min C:2.5~25; Ar:2.5~25 L/min He:2.5~25; Ar:5~50 L/min Ar:2.5~25; He:8~80 L/min Ar:5~50; N:5~50 L/min C:5~50; O:5~50 L/min C:5~50; N:5~50 L/min C:5~50; Ar:5~50 L/min C:5~50; N:5~50 L/min C:2.5~25; Ar:10~100 L/min Ar:5~50; H:15~150 L/min O,C:0.5~5; Ar:2.5~25 L/min He,C:1~10; Ar:5~50 L/min |
10% 10% 10% 7% 2% 20% 20% 20% 20% 50% 4% 50% 30% 20% 50% 50% 50% 50% 50% 20% 25% O,C:15% He,C:15% |
0.8%~40% 0.8%~40% 0.8%~40% 0.8%~40% 0.4%~28% 2%~60% 2%~60% 2%~60% 2%~60% 10%~90% 0.4%~28% 10%~90% 5%~80% 3%~75% 10%~90% 10%~90% 10%~90% 10%~90% 10%~90% 2.5%~70% 4%~75% O,C:2%~60%; O,C:2%~60%; |
M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) M16-1.5RH ( M ) |
注1：浓度调节范围影响输出流量，不同的浓度对应相应的流量！
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