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U210 Series UHP Absolute Regulator
U210 Series UHP Absolute Regulator
U210 series single stage ultra high purity absolute regulator is developed for the semiconductor industry, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100 clean room.
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4” face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested
Dimensions
Dimensions
Flow Data
Flow Data
Ordering Information
订购指南
EX: U210
Series
SL
Body
B
Ports
K
Seat
- G
Inlet Pressure
Q
Outlet Pressure
P
Pressure Gauge*
- VSF4
Inlet/Outlet Connection
- H
Corrosion Resistance
- P
Options
- S1
Process Standard
U210 SL: 316L
SLV: 316L VAR
A
B
G
K: PCTFE
G: 250 psi P: 30” Hg Vac~15 psi
Q: 30” Hg Vac~30 psi
R: 30” Hg Vac~60 psi
S: 30” Hg Vac~100 psi
W: Without Gauge
P: psi/bar Gauge K: psi/kPa Gauge
VSF4, VSM4
VSF8, VSM8
TW4, TW6
......
When Inlet and Outlet
Connections are the same,
please write a connection code.
None: Standard
H: C-22 stem
and nozzle
See Material
Configuration table.
None: Rear Bracket Mounting
P: Panel Mounting
S1:UHP Process Standard
S2:Photovoltaic
Process Standard

*: Gauges’ connection: 1/4″swivel male FSR , other connection type please conect GENTEC.