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GENTEC VG22 Series Vacuum Generator
VG22 Series Vacuum Generator
Features
316L stainless steel construction
Cleaned, welded assembled, tested and packaged in Class 100 (ISO 5) cleanroom
Internal surface finish 0.4 um
660 mmHg ( 100 Torr ) vacuum generated with a minimum source nitrogen pressure of 75 psi
Helium leak tested
Used in gas delivery systems to assist in purging piping systems
Vacuum Chart
VG22 Series Vacuum Generator
Dimensions
VG22 Series Vacuum Generator
Ordering Information
EX: SL
Material		 - VG22
Series Number		 - VM4
N2 Inlet		 - VM8
Vent Connections		 - VM4
Vacuum Connections		 - S2
Process Standard
SL: 316L
VG22
VM4
VM4
VM8 		VM4: 1/4″ face seal male
VM8: 1/2″ face seal male
VSM4: 1/4″ face seal swivel male
VSF4: 1/4″ face seal swivel female
TW4: 1/4″ tube weld		 S1: UHP Process Standard
S2: Photovoltaic Process Standard
Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
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