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GENTEC Vacuum Generator
Vacuum Generator
Features
316L stainless steel construction
Cleaned, welded assembled, tested and packaged in Class 10 clean room
Internal surface finish 0.4 um
660 mmHg ( 100 Torr ) vacuum generated with a minimum source nitrogen pressure of 75 psi
Helium leak tested
Used in gas delivery systems to assist in purging piping systems
Ordering Information
EX: SL
Material		 - VG22
Serial No.		 - VM4
N2 Inlet		 - VM8
Vent Connection		 - VSM4
Vacuum Connections		 Connections
SL: 316L
VG22
VM4
VM8
VM4
VSM4
VSF4
VM4: 1/4" face seal male
VM8: 1/2" face seal male
VSM4: 1/4" face seal swivel male
VSF4: 1/4" face seal swivel female
Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
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