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W-Seal Substrate
W-Seal Substrate
Features
The material meets the ultra-high purity grade requirements of SEMI F20 standard.
Wetted Surface meets the ultra-high purity grade requirements of SEMI F19 standard, with a surface roughness of Ra 5 μin.
All materials and production processes are traceable.
The final cleaning and packaging are completed in a Class 100 cleanroom, in compliance with S1 ultra-high purity process specifications.
1.125″ W-Seal, Complies to SEMI F102 interfaces
Dimensions
Dimensions
Dimensions
Dimensions
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