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IGS MV3 Series Metering Diaphragm Valves
IGS MV3 Series Metering Diaphragm Valves
MV3 Series Metering Diaphragm Valve is developed for use with integrated gas systems (IGS).
Features
Assembled and packaged for Ultra-high purity semiconductor applications
Precision graduated knob
Helium-leak tested
Electropolished Flow Paths
1.125″ C-Seal or 1.125″ W-Seal
Dimensions
Dimensions
FLOW
FLOW
Inlet and Outlet
Inlet and Outlet
Ordering Information
Ex: SLVV
Body		 - MV30
Series Number		 M
Knob Type		 - 11C2
Connection Type		 - K
Seal Material		 - S1
Process Standard
SLVV: 316L VIM VAR
SLV: 316L VAR		 MV30
MV31		 M: Micrometer handle 11C2: 1.125″ C-Seal， two holes
11W2: 1.125″ W-Seal， two holes
……
Other connection styles are available		 K: PCTFE S1: Ultra-high purity process
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