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IGS ALD27 SERIES DIAPHRAGM VALVES
IGS ALD27 SERIES DIAPHRAGM VALVES
ALD27 Series Diaphragm Valves are designed for atomic layer deposition processes in the semiconductor industry.
Features
Suitable for high purity applications
High speed actuation ≤5ms
Pre-set flow adjusting mechanism ensures precise and consistent Cv from valve to valve
Optional solenoid pilot valve for high speed actuation control
Optional position sensor
100% Helium-leak tested
1.5″ C-Seal
Dimensions
Dimensions
Accessory informatioI
Accessory informatioI
Inlet and Outlet
Inlet and Outlet
Ordering Information
EX: SLVV
Body		 - ALD27
Valve Series		 T
Temperature		 P
Valve Type		 S
Working Pressure		 - 15C2
Connection Type		 - IS
Options		 - S1
Process Standard
SLVV: 316L VIM VAR
SLV: 316L VAR		 ALD27 Blank: standard
T: with thermal bridge		 P: pneumatic S: 150 psi 15C2: 1.5″ C-Seal， two holes
15C3: 1.5″ C-Seal， three holes
……
Please contact GENTEC for
more infommation		 IS: with position sensor
IV: with solenoid pilot
valve
IH: with heater mounting
hole		 S1: Ultra-high purity
process
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