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IGS ALD26 Series Diaphragm Valves
IGS ALD26 Series Diaphragm Valves
ALD26 Series Diaphragm Valves are designed for atomic layer deposition processes in the semiconductor industry.
Features
Suitable for ultra high purity applications with 316L VAR or VIM VAR stainless body
High speed actuation ≤5ms
Pre-set flow adjusting mechanism ensures precise and consistent Cv from valve to valve
Optional solenoid pilot valve for high speed actuation control
Optional optical position sensor or amplifier
100% Helium-leak tested
Ultrahigh cycle life
Dimensions
Dimensions
Accessory Information
Accessory Information
Inlet and Outlet
Inlet and Outlet
Ordering Information
EX: SLVV
Body		 - ALD26
Series Number		 T
Temperature		 P
Valve Type		 S
Working Pressure		 - 11W2
Connection Type		 - IS
Options		 - S1
Process Standard
SLVV: 316L VIM VAR
SLV: 316L VAR		 ALD26 None: standard type
T: with thermal bridge		 P: Pneumatic S: 150 psi 11C2: 1.125″ C-Seal，two holes
11C3: 1.125″ C-Seal，three holes
11W2: 1.125″ W-Seal，two holes
11W3: 1.125″ W-Seal，three holes
……
Other connection styles are available		 IS: with optical position
sensor and amplifier
（Optical position sensors
need to be used in conjunction
with amplifiers.）
IV: with solenoid pilot valve		 S1: Ultra-high purity process
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