IGS DV02 Series Pneumatic Diaphragm Valve
DV02 Series Pneumatic Diaphragm Valves are developed for use with integrated gas systems (IGS).
Features
Assembled and packaged for Ultra-high purity semiconductor applications
Compact Design
Pneumatic Actuator: NC or NO
Optional position sensor
Cobalt-based superalloy diaphragm
100% Helium-leak tested
1.125″ C-Seal or 1.125″ W-Seal

















































沪 ICP备案 05032053

