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IGS DV02 Series Pneumatic Diaphragm Valve
IGS DV02 Series Pneumatic Diaphragm Valve
DV02 Series Pneumatic Diaphragm Valves are developed for use with integrated gas systems (IGS).
Features
Assembled and packaged for Ultra-high purity semiconductor applications
Compact Design
Pneumatic Actuator: NC or NO
Optional position sensor
Cobalt-based superalloy diaphragm
100% Helium-leak tested
1.125″ C-Seal or 1.125″ W-Seal
Dimensions
Dimensions
Position Sensor Technical Information
Position Sensor Technical Information
Inlet and Outlet
Inlet and Outlet
Ordering Information
EX: SLVV
Body
- DV02
Series Number
P
Actuation
- 11C2
Connection Type
- NO
Options
- IS
Options
- S1
Process Standard
SLV: 316L VAR
SLVV: 316L VIM VAR
DV02
P: Pneumatic
11C2: 1.125" C-Seal, two holes
11C3: 1.125" C-Seal, three holes
11W2: 1.125" W-Seal, two holes
11W3: 1.125" W-Seal, three holes
……
Other connection styles are available
Blank: Normally closed
(Standard)
NO: Normally open
Blank: Standard
IS: with position sensor
S1: Ultra-high purity process
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