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IGS DV01 Series Pneumatic Diaphragm Valve
IGS DV01 Series Pneumatic Diaphragm Valve
DV01 Series Pneumatic Diaphragm Valves are developed for use with integrated gas systems (IGS).
Features
Assembled and packaged for Ultra-high purity semiconductor applications
Compact Design
Pneumatic Actuator: NC or NO
Cobalt-based superalloy diaphragm
100% Helium-leak tested
1.125″ C-Seal or 1.125″ W-Seal
Dimensions
Dimensions
Inlet and Outlet
Inlet and Outlet
Ordering Information
EX: SLVV
Body		 - DV01
Series Number		 P
Actuation		 - 11C2
Connection Type		 - NO
Options		 - S1
Process Standard
SLV: 316L VAR
SLVV: 316L VIM VAR
 DV01
 P: Pneumatic
 11C2: 1.125" C-Seal, two holes
11C3: 1.125" C-Seal, three holes
11W2: 1.125" W-Seal, two holes
11W3: 1.125" W-Seal, three holes
……
Other connection styles are available
 Blank: Normally closed
（Standard）
NO: Normally open
 S1: Ultra-high purity process
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