Language
  • IGS
  • Regulators
  • Valves
  • Fittings
  • Gauges
  • Gas Systems
  • Welding, Cutting & Heating Apparatus
  • Others
IGS R02 Series Regulator
IGS R02 Series Regulator
R02 Series Regulators are developed for use with integrated gas systems (IGS).
Features
Assembled and packaged for Ultra-high purity semiconductor applications
Cobalt-based superalloy diaphragm
Metal to metal diaphragm to body seal
Helium-leak tested
Electropolished Flow Paths
1.125″ C-Seal or 1.125″ W-Seal
Dimensions
Dimensions
Flow Data
Flow Data
Inlet and Outlet
Inlet and Outlet
Ordering Information
EX: SLVV
Body		 - R02
Series Number		 - K
Outlet Pressure		 - 11C2
Connection Type		 - K
Seal Material		 - S1
Process Standard
SLVV: 316L VIM VAR
SLV: 316L VAR		 R02 I: 0~100 psi
J: 0~75 psi
K: 0~50 psi
L: 0~25 psi
 11C2: 1.125″ C-Seal， two holes
11W2: 1.125″ W-Seal， two holes
……
Other connection styles are available		 K: PCTFE S1: Ultra-high purity
process
Download
2D
3D
2D/3D data download
Name：*
Company：*
Phone：*
E-mail：*
Area：*
  • 1
Product Category：*
  • IGS
  • Regulators
  • Valves
  • Fittings
  • Gauges
  • Gas Systems
  • Welding, Cutting & Heating Apparatus
  • Others
(Multiple choice)
IGS
Regulators
Valves
Fittings
Gauges
Gas Systems
Welding, Cutting & Heating Apparatus
Others
*Your information is incomplete, please fill it out and send it again!
Your application has been sent!
Our sales staff will contact you as soon as possible!
After-sales phone
400-1898-322

Copyright © 2009-2012 GENTEC SHANGHAI CORPORATION   沪 ICP备案 05032053