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IGS R01 Series Regulator
IGS R01 Series Regulator
R01 Series Regulator is developed for use with integrated gas systems (IGS).
Features
Assembled and packaged for Ultra-high purity semiconductor applications
Cobalt-based superalloy diaphragm
Helium-leak tested
Electropolished Flow Paths
1.125″ C-Seal or 1.125″ W-Seal
Dimensions
Dimensions
FLOW
FLOW
Ordering Information
订购指南
EX: SLVV
Body		 - R01
Series Number		 - K
Outlet Pressure		 - 11C2
Connection Type		 K
Seal Material		 - S1
Process Standard
SLV: 316L VAR
SLVV: 316L VIM VAR
 R01
R01A
 I: 0 ~ 100 psi
J: 0 ~ 75 psi
K: 0 ~ 50 psi
L: 0 ~ 25 psi
 11C2: 1.125″ C-Seal，two holes
11W2: 1.125″ W-Seal，two holes
……
Other connection styles are available
 K: PCTFE
T: PFA
 S1: Ultra-high purity process
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