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U72 Series UHP Back Pressure Regulator
U72 Series Diaphragm Back Pressure Regulator is used to regulate the upstream pressure with precise pressure control, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100 clean room.
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4” face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested
沪 ICP备案 05032053
