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GENTEC UHP Gas Sticks
UHP Gas Sticks
Features
DV86 / DV87 series diaphragm valves
U11 / U13 / U21 / U22 series UHP regulators
100% Helium-leak
Cleaned, assembled, and packaged for high purity semiconductor applications
Inlet & Outlet Connections: 1/4″, 1/2″ VCR
Maximum Inlet Pressure: 500 psi, 250 psi, 150 psi
Maximum Outlet Pressure: 100 psi, 75 psi, 50 psi
Temperature Range: -40 ~ 165˚F (-40 ~ 74˚C)
Wetted Surface Finish: Ra 7 μin
Dimensions
GENTEC UHP Gas Sticks
Ordering Information
Ex: PU21
Series Number		 1
Inlet & Outlet Connection		 1
NO. of Terminals		 SL
Material		 - H
Inlet Pressure		 K
Outlet Pressure		 P
Gauge		 T
Options		 - VSM4
Inlet / Outlet Connection
PU11: 1/4″(U11 Regulator+DV86)
PU13: 1/2″(U13 Regulator+DV87)
PU21: 1/4″(U21 Regulator+DV86)
PU22: 1/2″(U22 Regulator+DV87)		 1: 1 In, 1 Out 1: One way
2: Two way
3: Three way		 SL: 316L F: 500 psi
G: 250 psi
H: 150 psi		 I: 100 psi
J: 75 psi
K: 50 psi		 P: psi /bar Blank: Pressure Guage
T: Pressure Transducer
C: Electronic Contact Gauges		 VSM4: 1/4″ MVCR
VSF4: 1/4″ FVCR
VSM8: 1/2″ MVCR
VSF8: 1/2″ FVCR
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  • Regulators
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