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GENTEC UFS20, UFS30 Series Flow Switch
UFS20, UFS30 Series Flow Switch
UFS20, UFS30 series is excess flow switch with bypass design utilizing UFS resides in bypass leg with a mainline orifice between the legs to create a pressure drop for tripping, when the mainline flow continually increasing to the flow trip points range, continually increasing to the flow trip points range. It can be used in Bulk Specialty Gas Systems (BSGS), especially suitable for the over-flow fault alarm of ultra-high purity gas, toxic gas or corrosive gas in the semiconductor industry.
Features
Magnetic reed switch
Meet SEMI standards
Working Pressure: 1/2″: Vacuum to 3500 psi, 3/4″, 1″: Vacuum to 2400 psi
100% factory inspection
Dimensions
GENTEC UFS20, UFS30 Series Flow Switch
Ordering Information
Size Connection (Inlet - Outlet) A B (Horizontal) B (Vertical) C
1/2"
VSM8 - VSF8
TW8
3.55 in.(90.1 mm)
2.59 in.(65.8 mm)
4.55 in.(115.6 mm)
4.55 in.(115.6 mm)
2.78 in.(70.7 mm)
2.78 in.(70.7 mm)
3.05 in.(77.5 mm)
3.05 in.(77.5 mm)
3/4"
VSM12 - VSF12
TW12
5.51 in.(140.0 mm)
3.48 in.(88.4 mm)
5.44 in.(138.2 mm)
5.44 in.(138.2 mm)
3.59 in.(91.2 mm)
3.59 in.(91.2 mm)
3.05 in.(77.5 mm)
3.05 in.(77.5 mm)
1"
VSM16 -VSF16
TW16
6.22 in.(158.0 mm)
3.88 in.(98.5 mm)
5.57 in.(141.5 mm)
5.57 in.(141.5 mm)
3.72 in.(94.5 mm)
3.72 in.(94.5 mm)
3.05 in.(77.5 mm)
3.05 in.(77.5 mm)
Ex: SL
Body Material		 - UFS20
Series Number		 - 225
Flow Switch Size		 - VSF8
Inlet / Outlet Connection*		 - S1
S1: UHP Process Standard
SL: 316L UFS20
UFS30		 225: 225 slpm
350: 350 slpm
500: 500 slpm
950: 950 slpm		 VSF8: 1/2”swivel male FSR
VSF8: 1/2”swivel female FSR
TW8: 1/2”weld stub		 S1: UHP Process Standard
1100: 1100 slpm
1650: 1650 slpm
2600: 2600 slpm		 VSF12: 3/4”swivel male FSR
VSF12: 3/4”swivel female FSR
TW12: 3/4”weld stub
3000: 3000 slpm
4000: 4000 slpm		 VSF16: 1”swivel male FSR
VSF16: 1”swivel female FSR
TW16: 1”weld stub

UFS20-1200(2).png

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