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GENTEC UFS Series Flow Switch
UFS Series Flow Switch
UFS series flow switches are used with corresponding electrical devices (light, low voltage audible / visual alarms and relays,etc.) for the over-flow alarm of ultra-high purity gas, toxic gas or corrosive gas in the semiconductor industry.
Features
Suitable for ultra-high purity gas systems
When the flow rate is higher than the set value, the output switching signal
Meet SEMI standards
Meet the cleanliness standards of semiconductor manufacturing equipment
Operating pressure from Vacuum to 3500 psi
100% factory inspection
Dimensions
GENTEC UFS Series Flow Switch
Ordering Information
Size Connection (Inlet - Outlet) H A B J hex
1/4"
VM4
VSF4
TW4
VM4-VSF4
VM4-TW4
VSF4-VM4
VSF4-TW4
TW4-VM4
TW4-VSF4
2.25 in.(57 mm)
3.99 in.(101 mm)
2.25 in.(57 mm)
3.12 in.(79 mm)
2.25 in.(57 mm)
3.12 in.(79 mm)
3.12 in.(79 mm)
2.25 in.(57 mm)
3.12 in.(79 mm)
0.625 in.(16 mm)
1.495 in.(38 mm)
0.625 in.(16 mm)
0.625 in.(16 mm)
0.625 in.(16 mm)
1.495 in.(38 mm)
1.495 in.(38 mm)
0.625 in.(16 mm)
0.625 in.(16 mm)
0.625 in.(16 mm)
1.495 in.(38 mm)
0.625 in.(16 mm)
1.495 in.(38 mm)
0.625 in.(16 mm)
0.625 in.(16 mm)
0.625 in.(16 mm)
0.625 in.(16 mm)
1.495 in.(38 mm)
-
S 0.75 in.(S 19 mm)
-
S 0.75 in.(S 19 mm)
-
S 0.75 in.(S 19 mm)
S 0.75 in.(S 19 mm)
-
S 0.75 in.(S 19 mm)
EX: SLV
Body Material		 - UFS
Series Number		 - 25
Flow Switch Size		 - VM4
Inlet / Outlet Connection*		 - S1
Process Standard
SLV: 316L VAR UFS 10: 10 slpm
25: 25 slpm
50: 50 slpm
100: 100 slpm		 VM4: 1/4”internal male FSR
VSF4: 1/4” swivel female FSR
TW4: 1/4”weld stub
......
Please contact GENTEC for more information		 S1: UHP Process Standard

*: When the inlet and outlet connections are identical, only one code should be provided. If they differ, the first code corresponds to the inlet connection, while the second code is for the outlet connection.

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