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GENTEC MV3 Series Bellows Ellows Metering Valves
MV3 Series Bellows Ellows Metering Valves
MV3 series diaphragm metering valves are specifically designed for use in high purity gas applications within semiconductor manufacturing equipment.
Features
Materials 316L or 316L VAR stainless steel
Scaled knob switch
FSR connection
100% Helium-leak tested
Dimensions
GENTEC MV3 Series Bellows Ellows Metering Valves
Flow Data
GENTEC MV3 Series Bellows Ellows Metering Valves
Ordering Information
EX: SL
Body Material
- MV30
Valve Series
M
Knob Type
- VSM4
Inlet / Outlet Connection*
- S2
Process Standard
SL: 316L
SLV: 316L VAR
MV30
MV31
M: Micrometer handle VSM4: 1/4” swivel male FSR
VSF4: 1/4” swivel female FSR
......
Please contact GENTEC for more information
S1: UHP Process Standard
S2: Photovoltaic Process Standard

*: When the inlet and outlet connections are identical, only one code should be provided. If they differ, the first code corresponds to the inlet connection, while the second code is for the outlet connection.

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