Language
BSV102 Series Bellows Valves
BSV102 Series Bellows Valves
The GENTEC® BSV102 Series bellows valve is designed for large-scale, high-purity gas delivery systems in the semiconductor industry. It meets the demands of critical process applications by combining high flow capacity and low pressure drop with superior leak-tightness and safety in gas conveyance.
Features
Y-type body design
Stainless steel bellows welded construction
Optional body configuration with purge port
Cleaned, assembled and packaged for ultra-high purity semiconductor applications
Fully internal electropolished
100% Helium-leak tested
Dimensions
Dimensions
Ordering Information
EX: SL
Body
- BSV102
Valve Series
M
Valve Type
- TW16
Inlet / Outlet Connection
- K
Seat material
- PC1
Purge Connection
- S1
Process Standard
SL: 316L BSV102: 3/4″ M: Manual TW12:3/4″ weld stub
TW16: 1″ weld stub
VSF12: 3/4″ swivel female FSR*
VSF16: 1″ swivel female FSR*
VSM12: 3/4″ swivel male FSR*
VSM16: 1″ swivel male FSR *
......
When Inlet and Outlet Connections are
the same, please write a connection code.
K: PCTFE
V: Vespel®
None: No purge ports
PC1: VSM4 purge connection,downstream
PC2: VSM4 purge connections,upstream & downstream
PC3: VSM4 purge connection,upstream
S1: UHP Process Standard
S2: Photovoltaic Process Standard

* VSF, VSM connection type please contact GENTEC.

Download
2D
3D