V400 Series UHP Cylinder Valves
V400 series cylinder valve is developed for the semiconductor industry. It is designed for use with ultra-high purity gas cylinders to prevent gas leakage and achieve the low leakage rates demanded by ultra-high purity gas users.
Features
Suitable for most specialy gases including variants for oxygen and highly corrosive gases such as chlorine and hydrogen chloride
Manual and pneumatic versions are available based on a common body design
Final assembly and testing are carried out under Class 100 (ISO 5) cleanroom
conditions
100% high-pressure helium leak test
Tied-diaphragm design with replacable valve seat
Various inlet and outlet gas connection standards are available (CGA, JIS, ISO etc.)
For transportation the actuator can be locked to prevent shock-induced leakage
沪 ICP备案 05032053
