Language
  • Regulators
  • Valves
  • Fittings
  • Gas Systems
  • Welding, Cutting & Heating Apparatus
U61 Series Tied-Diaphragm UHP Regulator
U61 Series Tied-Diaphragm UHP Regulator
U61 series Tied-Diaphragm ultra high purity regulator is developed for the semiconductor industry, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100（ISO 5） clean room.
Features
316L stainless steel body
Based on the proven bellow technogy
Bellow seal valves to safeguard against leakage
Rear bracket mounting
Gauge ports are standard with 1/4" face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested
Dimensions
Dimensions
Flow Data
Flow Data
Ordering Information
订购指南
Ex: U61
Series		 SL
Body		 B
Ports		 K
Seat		 - D
Inlet Pressure		 I
Outlet Pressure		 P
Pressure Gauge		 - VSF8
Inlet / Outlet Connection		 - E
Surface Finish		 - H
Corrosion Resistance
U61
U61A		 SL: 316L A
B
G		 K: PCTFE
V: Vespel®		 D: 3000 psi
X: 2200 psi
E: 1500 psi
F: 500 psi
 G: 0 ~ 250 psi
H: 0 ~ 150 psi
I: 0 ~ 100 psi
K: 0 ~ 50 psi
L: 0 ~ 25 psi		 W: Without Gauge
P: psi / bar Gauge
K: psi / kPa Gauge		 VSF8, VSM8, VSF12, VSM12
VSF16, VSM16, TW12, TW16
......
When Inlet and Outlet
Connections are the same,
please write a connection code.		 E: Ra 10 μin None: 316L
H: HC22 stem and nozzle
Industry application
Widely used in semiconductor industry More
Also applied to photovoltaic industry More
Download
Catalog
2D
3D
2D/3D data download
Name：*
Company：*
Phone：*
E-mail：*
Area：*
  • 1
Product Category：*
  • Regulators
  • Valves
  • Fittings
  • Gas Systems
  • Welding, Cutting & Heating Apparatus
(Multiple choice)
Regulators
Valves
Fittings
Gas Systems
Welding, Cutting & Heating Apparatus
*Your information is incomplete, please fill it out and send it again!
Your application has been sent!
Our sales staff will contact you as soon as possible!
After-sales phone
400-1898-322

Copyright © 2009-2012 GENTEC SHANGHAI CORPORATION   沪 ICP备案 05032053