U41 Series UHP Regulator
U41 series single stage ultra high purity regulator is developed for the semiconductor industry, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100 clean room.
Features
316L stainless steel body
Based on the proven bellow technogy
Bellow seal valves to safeguard against leakage
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested