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GENTEC U41 Series UHP Regulator
U41 Series UHP Regulator
U41 series single stage ultra high purity regulator is developed for the semiconductor industry, it is manufactured in accordance with SEMI requirement and assembled, tested and packaged in a class 100 clean room.
Features
316L stainless steel body
Based on the proven bellow technogy
Bellow seal valves to safeguard against leakage
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male
Fully internal electropolished
Cleaned, assembled, and packaged for high-purity semi-conductor applications
High-cycle life
100% Helium-leak tested
Dimensions
GENTEC U41 Series UHP Regulator
Flow Data
GENTEC U41 Series UHP Regulator
Ordering Information
订购指南
Ex: U41
Series
SL
Body
B
Ports
K
Seat
- D
Inlet Pressure
E
Outlet Pressure
P
Pressure Gauge
- VSF4
Inlet / Outlet Connection
- E
Surface Finish
- P
Options
U41 SL: 316L A
B
G
K: PCTFE
V: Vespel®
D: 3000 psi E: 0 ~ 1500 psi
F: 0 ~ 500 psi
W: Without Gauge
P: psi / bar Gauge
K: psi / kPa Gauge
VSF4, VSM4, VSF8, VSM8
TW4, TW6
......
When Inlet and Outlet
Connections are the same,
please write a connection code.
E: Ra 10 μin P: Panel Mounting

*: Gauges’ connection: 1/4”swivel male FSR , other connection type please conect GENTEC.