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GU20SL & GUR20SL Series UHP Pressure Gauges
GU20SL & GUR20SL Series UHP Pressure Gauges
The GU20SL and GUR20SL Series ultra-high purity pressure gauges are specifically designed for use in semiconductor processes, ultra-high purity gas systems and ultra-high purity equipment.
Features
Imported bourdon tube
Assembly, calibration and packaging are performed in a Class 100 (ISO 5) cleanroom
Electro-polished components and connection
Product 100% helium test
Accuracy: 3-2-3
Meet semi standards
ASME B40.100
Dimensions
Dimensions
Pressure Range
Pressure Range
Ordering Information
Ex: GU20SL
Series
- 60
Pressure Ranges
P
Pressure Unit
- VSM4
Inlet Connection
- S1
Process Standard
GU20SL: 2″, Radial
GUR20SL: 2″, Axial
30
60
100
......
p/b: psi / bar
p/k: psi / kPa
VSM4: 1/4" Face seal swivel male (FSR fittings)
VSF4: 1/4" Face seal swivel female (FSR fittings)
......
Please contact GENTEC for more information
S1: UHP Process Standard
S2: Photovoltaic Process
Standard
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2D
3D