VG23 Series Vacuum Generator
VG23 series vacuum generator integrates monoblock vacuum venturi, air actuated valve and check valve, achieving
a maximum vacuum of -88 kPa. The vacuum generator equipped with a constant bleed port, allowing nitrogen to bleed
ensuring bleeding path of an inert state. Suitable for the semiconductor industry, etc, application.
Features
Operating temperature: 14°~160℉ (10~71℃）
N2 inlet pressure gange: 70 ~ 110 psi, connection: VM4, VSF4
Maximum vacuum: - 88 kPa*, maximum pressure: 3500 psi, connection: VM4,VSF4,TW4
Valve status: normally closed（N.C.）, actuation pressure: 60 ~ 110 psi
沪 ICP备案 05032053
