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 U22 Series UHP Regulator
U22 Series UHP Regulator
U22 Series single-stage regulators are purge gas, pressure reducing regulators. Applicable to gas system for non-corrosive, corrosive, and toxic gases. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.
Features
316L or 316L VAR stainless steel body
Metal to metal diaphragm to body seal
Easy front panel and rear bracket mounting
Gauge ports are standard with 1/4" face seal male
Fully internal electropolished
Cleaned, assembled and packaged for high purity semiconductor applications
High-cycle life
100% Helium-leak tested
Dimensions
Dimensions
Flow Data
Flow Data
Ordering Information
订购指南
EX: U22
Series
SL
Body
A
Ports
K
Seat
- D
Inlet Pressure
H
Outlet Pressure
W
Gauge*
- VSF8 - VSM8
Inlet / Outlet Connection
- P
Options
U22 SL: 316L
SLV: 316L VAR
A
B
G
J
M
K: PCTFE
V: Vespel®
D: 3000 psi
F: 500 psi
G: 0~250 psi
H: 0~150 psi
I: 0~100 psi
K: 0~50 psi
L: 0~25 psi
W: Without Gauge
P: psi / bar Gauge
K: psi / kPa Gauge
VSF8: 1/2” swivel female FSR
VSM8: 1/2” swivel male FSR
......
When Inlet and Outlet Connections
are the same, please write a connection code.
None: Ra 20 μin
E: Ra 10 μin
P: Panel Mounting
H: HC-22 Diaphragm

*: Gauges’ connection: 1/4”swivel male FSR , other connection type please conect GENTEC.